This paper reports on the technology and performance of piezoresistive pressure sensors that utilize GaAs/AlGaAs membranes for pressure transduction into stress to induce resistance changes of p doped GaAs resistors. We have tested the sensor to differential pressure up to 8*10 4 Pa and in a temperature range of room temperature up to 433 K.
No takes yet. Share an insight, caveat, or question.
Dehé et al. (1995) studied this question.
Synapse has enriched 3 closely related papers on similar clinical questions. Consider them for comparative context: