An algorithm for computing linear four-point probe thickness correction factors

An accurate algorithm is described for the computation of the theoretical values of the linear four-point probe thickness correction factors for point injection of current and insulating and conducting substrates. Three expressions are presented for the insulating substrate case that yield maximum fractional errors of 0.03%, 10−6, and 10−16, respectively. Additional expressions are presented for the case of a film on a conducting substrate and a critical comparison of the two cases is made. The theoretical basis of the algorithms, a Euler–Maclaurin expansion, is described.