Nanoscale Metal-Oxide-Semiconductor (MOS) capacitors have emerged as versatile building blocks in photonics, enabling a wide range of applications, from optical modulators to sensors. The integration of these devices with traditional CMOS technology offers the potential for low-cost, high-performance, and energy-efficient photonic systems. This review delves into the fundamental concept, high impact applications, and future prospects of nanoscale MOS capacitors in photonics. Numerical method usage and comparative results are presented to illustrate this important technological paradigm.
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Chelly et al. (2025) studied this question.
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