Extraction of correct Schottky barrier height of sulfur implanted NiSi/n-Si junctions: Junction doping rather than barrier height lowering

Proper analysis of the Schottky barrier height extraction methods shows that sulfur implantation followed by anneal does not effectively reduce the Schottky barrier height of NiSi/n-Si contacts. Instead, the results for sulfur implanted samples are consistent with enhanced field emission due to an increased doping density of the surface region of the silicon. Sulfur has a large impact on contact resistivity for silicon with low initial doping concentration (<∼1017 cm−3), but little impact for silicon with high initial doping density (>∼1017 cm−3). Internal photoemission measurements show that the Schottky barrier height remains unchanged with sulfur implantation.