Ultrathin films: A new molecular layer deposition process for the synthesis of nanoporous nitrogen-doped titanium dioxide films is developed. This process is based on a four-step ABCB reaction sequence using TiCl4, ethanolamine, and malonyl chloride as precursors (see picture). The obtained nanoporous N-doped TiO2 exhibits excellent photocatalytic activity upon irradiation with visible light.
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Chen et al. (2013) studied this question.
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