A capacitively coupled radiofrequency (rf) (13.56 MHz) cylindrical argon micro-discharge expanding into a larger glass tube is studied by performing optical and electrical measurements over a pressure range 0.3–5 Torr and a rf power range 5–40 W. Measurements of the axial and radial plasma density profiles at the Paschen minimum near 1.5 Torr are used to develop a global model of the discharge and estimate neutral heating from ion–neutral charge exchange collisions for micro-propulsion applications.
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Charles et al. (2012) studied this question.
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