Experimental study demonstrates high-speed microbump height profiling in semiconductor chips at 50 frames per second, highlighting rapid non-destructive optical quality inspection.
Parallel detection of several achromatic phase-shifted images is used to obtain a high-speed, high-resolution, full-field, optical coherence probe tomography system based on polarization interferometry. The high enface imaging speed, short coherence gate, and high lateral resolution provided by the system are exploited to determine microbump height uniformity in an integrated semiconductor chip at 50 frames per second. The technique is demonstrated using the Linnik microscope, although it can be implemented on any polarization-based interference microscopy system.
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Safrani et al. (2015) studied this question.
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