A principal requirement for quantitative AES and XPS is the ability to measure true spectral intensities. In order to achieve this we have developed a fully instrumented electron spectrometer to measure absolute intensities for AES and XPS. The spectra contain no distortion due to the energy dependencies of the analyser transmission or the detector efficiency, and therefore provide the true spectrum n ( E ) with a known uncertainty. In addition, the intensity scale is known accurately in terms of electrons detected per unit of incident flux. The experimental methods and theoretical basis used in the determination of standard reference spectra are discussed, and results are presented for both Auger electron and x‐ray photoelectron spectroscopies. AES or XPS spectra of NPL reference materials taken on any user's instrument, with the appropriate conditions, may be compared with the true spectra derived here to calibrate the energy dependence of that particular instrument's intensity scale. In this way, all instruments may be calibrated absolutely to an accuracy of ±2%.
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Smith et al. (1990) studied this question.