In order to improve the surface quality of the pulsed laser deposited YBCO thin films an off-axis deposition geometiy is proposed. Using this new PLD geometry, YBCO thin films have been grown on SrTi03substrates. These films were found to have a good surface morphology without droplets or other particulates, and good supelrconducting and structural properties. We have obtained Tc(R=0)=89 K, R(300)/R(100)=2.6, ΔT=1.5 K, Jc=2×106A/cm2(at 77 K and zero magnetic field), and the FWHM of the rocking curve of (005) YBCO peak is about 0.12°. A study regairding the influence of the deposition parameters on the film quality is also presented.
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Boffa et al. (1997) studied this question.
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