Punchthrough current for submicrometer MOSFETs in CMOS VLSI

Simulated and measured data show that drain-induced barrier lowering (DIBL) in buried-channel MOSFETs is different from that in surface channel (SC) MOSFETs. This is explained by the differences between channel current paths and channel potential distribution. A new parameter, defined as the incremental voltage that the drain can sustain before the punchthrough current increases by an order of magnitude, is used to indicate the rate of increase of punchthrough current and is a measure of DIBL.>