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Active magnetic bearings (AMBs) are applied to turbomolecular pumps (TMPs) and milling spindles. However, their application areas are limited because they are costlier and require larger space than conventional mechanical bearings. Omitting position sensors from AMBs is one of the promising methods to solve such problems. An additional merit is that rotors can be shortened to have a higher critical speed by removing sensor targets from the rotor. The sensorless operation of AMBs has already been achieved in several instruments developed for experimental study. In this research, the sensorless magnetic suspension method is applied to a TMP manufactured as an industrial product, and it is demonstrated that sensorless AMBs can suspend a high‐speed rotor.
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Mizuno et al. (1996) studied this question.
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