Thermally-modulated dissipation dilution in 2D NEMS resonators with explicit model and temperature-stable damping

Strain-diluted dissipation has emerged as a promising technique to modulate the quality ( Q ) factor of resonant nanoelectromechanical systems (NEMS). However, comprehensive understanding and precise control of this effect under varying temperatures have remained elusive. Here we investigate the temperature-modulated dissipation dilution mechanisms in two-dimensional (2D) NEMS resonators. We develop an explicit temperature-dependent dissipation dilution model highlighting the roles of thermally-induced strain and temperature fluctuations during vibration, which well captures experimental observations: with temperature increasing from 77 K to 355 K, Q factor in graphene resonators first decreases and then increases, while that in molybdenum disulfide (MoS 2 ) resonators monotonically decreases. Furthermore, based on the model, we design a graphene–MoS 2 heterostructure NEMS resonator with near-zero effective thermal expansion, which experimentally exhibits high temperature stability in both frequency and Q factor. Our results advance the understanding of dissipation dilution mechanisms and pave the way for developing thermally-stable resonant transducers and logic components.