ZnO films were prepared on soda-glass substrates and flexible polyimide films at low temperatures by linear source ultrasonic spray chemical vapor deposition without intentionally enhancing the energy of precursor reactions. Highly transparent ZnO films were deposited on both glass and polyimide at 180 °C using zinc acetate in a mixture of methanol and water. The deposition at low temperatures is attributed to water-activated precursor reactions.
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Nishinaka et al. (2007) studied this question.
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