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A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (ϕ∼1.0μm). Nanonuclei (ϕ∼30–50nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ∼50mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (∼5.5GHz) with a maximum quality factor (∼3).
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Vroubel et al. (2005) studied this question.
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