Sputtered multilayer films were studied by Fourier‐transform infrared spectroscopy (FTIR) and x‐ray diffraction (XRD), and their bonding structure and crystallization were compared with composite films. The thickness ratio of the multilayer films was fixed at 1:3, and the monolayer thickness was varied from 0.3 to 60 nm. With decreasing , crystallization of was lost, and the IR absorption at 930 cm −1 increased. These results suggest that and were changing their structure to a composite state with decreasing . In the intermediate between anatase crystal and noncrystal, of the multilayer films showed a different orientation from that of the composite films.
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Takahiro Nakayama (1994) studied this question.