We have developed high performance acoustic chips containing arrays of three-dimensional micromachined semi-ellipsoidal piezoelectric domes. The eigenfrequencies and mode shapes of the semi-ellipsoidal resonators are determined by the semi-principal axis lengths and also the acoustic loading by other resonators. By overlapping several modes of vibration, while considering the complex acoustic interaction between elements, highly efficient operation and an ultra wide-bandwidth frequency (up to 165%) response have been achieved from devices comprising multiple resonators. Customizable performance capabilities and high sensitivity (up to 300 W/cm2) at low-operating voltage (10 V amplitude) suitable for both therapeutic and imaging applications are demonstrated.
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Hajati et al. (2013) studied this question.
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