Ion Channeling and Scattering A nanoaperture defined by drilling in a hollow pyramidal atomic force microscope (AFM) tip is used to produce precise nitrogen vacancy (NV) center nanostructures in diamond by low energy nitrogen implantation. Ion scattering and channeling are the most important limiting factors to achieve high lateral resolution. In article number 1900528 by Nicole Raatz and co-workers, both effects are studied using iradina, crystal-trim and corresponding experiments.
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Raatz et al. (2019) studied this question.
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