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Molybdenum oxide thin films for gas sensing devices were deposited by rf reactive sputtering of a molybdenum target in Ar–O2 atmosphere. Then, a detailed structural, optical and electrical analysis was performed. The gas sensing features of deposited thin films were obtained by analysing the electrical response towards NO gas in the range 10 to 400 ppm. Electrical measurements showed that sputtered molybdenum oxide films are suitable for NO detection at operating temperatures of about 200 °C.
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Giulio et al. (1998) studied this question.
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