NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace

This paper presents the development of a compact nanopositioning stage with long-range capabilities and six-degree-of-freedom (DOF) closed-loop control. The system, referred to as NPS6D100, provides Ø100 mm planar and 10 mm vertical travel range while maintaining direct force transfer to the moving platform (or slider) in all DOFs. Based on an integrated planar direct drive concept, the system is enhanced by precise vertical actuation and full 6D output feedback control. The mechanical structure, drive architecture, guiding, and measurement subsystems are described in detail, along with experimental results that confirm sub-10 nm servo errors under constant setpoint operation and in synchronized multi-axis motion scenarios. With its scalable and low-disturbance design, the NPS6D100 is well suited as a nanopositioning platform for sub-10 nm applications in nanoscience and precision metrology.