A Study on the Development of CVD Precursors VI-Thermal Properties of Co(III) β-Diketonates

Thermal properties of a series of Co <TEX>β</TEX>-diketonates have been systematically investigated and it is found that tris(3,5-heptanedionato) cobalt(III) (<TEX>Co(hd)₃</TEX>) with the lowest melting point among them can be a better precursor than tris(2,2,6,6-tetramethyl-3,5-heptanedionato cobalt(III) (<TEX>Co(tmhd)₃</TEX>), one of the most popular precursors to date, under suitable conditions. Isothermal TGA study shows that <TEX>Co(hd)₃</TEX> would work better at higher temperature, while <TEX>Co(dmhd)₃</TEX> would be a better precursor at lower temperature.