Fabrication of high-density arrays of individually isolated nanocapacitors using anodic aluminum oxide templates and carbon nanotubes

We have fabricated high-density arrays of individually isolated semispherical nanocapacitors consisting of porous anodic aluminum oxide (AAO) layers as dielectric materials and carbon nanotubes (CNTs) as electrodes. It is shown that the nanocapacitors made with the CNT electrodes exhibit much better C-V behaviors than those without the CNT electrodes. The improved electrical behavior is explained in terms of the use of the CNT electrodes deposited within the porous AAO layers. The capacitance calculated using semispherical capacitor formula is in agreement with the experimental value.