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In this letter, a method to calibrate sensitivity for the three-dimensional displacement of X, Y, and Z directions by using the novel force curve, namely lateral force curve, as well as vertical force curve in atomic force/lateral force microscope (AFM/LFM) measurement is described. Furthermore, from quantized friction measurement based on the two-dimensional stick–slip model, it is experimentally confirmed that this lateral force curve calibration is reasonable.
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Fujisawa et al. (1995) studied this question.
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