In this study, super-smooth surfaces of oxygen-free high-conductivity copper mirrors obtained by single point diamond turning were characterized with an atomic force microscope from the three-dimensional (3D) point of view. The machining conditions were also studied. A program developed in this study for a unified approach to 3D surface finish assessment proposed by the Commission of European Community was used to obtain the 3D parameters. The feed rate was changed from 0.2 to 2.0 μm per revolution and 0.3–3.0 μm per revolution, respectively, in two experiments. By 3D roughness characterization of these surfaces, the optimal feed rate was found to be 1.4 μm per revolution when cutting depth was 1 μm or 0.9–1.2 μm per revolution at a cutting depth of 2 μm, where an S q of 2.6 and 2.3 nm could be obtained, respectively. The suggested 3D roughness characterization parameters may include S q, S sk, S ku, S tr, S al, S Δq, and one functional parameter, such as S bi.
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Zhong et al. (2002) studied this question.