The electrical surface resistance of diamond films deposited by the hot-filament chemical vapor deposition (CVD) method is measured in oxidizing and reducing atmospheres. The electrical surface resistance decreases in NO 2 , HCl and O 3 gases. On the other hand, it increases in NH 3 gas. The mechanism of change in electrical resistance is explained by the formation mechanism of a p -type surface conductive layer. The realization of a gas sensor will be discussed considering the experimentally obtained results.
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Gi et al. (1997) studied this question.
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