LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Lithium niobate (LiNbO 3 , LN) channel and ridge waveguides have been successfully fabricated by He ion implantation, which has energy of 500 keV and fluence of 1.5 10 16 ions=cm 2 and is combined with lithography and the precise diamond dicing technique. The refractive index profile of the annealed LN planar waveguide was reconstructed. The propagation loss of the channel waveguide with a width of 10 m and that of the ridge waveguides with widths of 25 m and 15 m were investigated by the end-face coupling method. In our work, the factors that affect the waveguide properties of channel and ridge waveguides were revealed.