Solid‐State film diffusion for the production of integrated optical waveguides

Solid‐state film ion exchange (Ag + ‐Na + ) in glass substrates has been investigated for the fabrication of passive, integrated, optical waveguides. A new ion exchange mechanism is proposed which couples the oxidation of silver metal to silver oxide and the diffusion of silver ions into the glass substrate. At high electric fields and/or high temperatures, the growth rate of a silver oxide film limits the formation of mobile silver ions and constrains the diffusion of silver into the glass. This new mechanism is able to predict the dopant distribution profile under those conditions and under conditions where a constant surface concentration is appropriate (infinitely thick oxide film). It also explains the characteristics of the current vs. time curve measured during the ion exchange process. The formation and growth of the silver oxide film were confirmed by X‐ray photoelectron spectroscopy and X‐ray diffraction analysis.