Single 170-as extreme ultraviolet (XUV) pulses delivering more than 10 6 photons/pulse at ∼100 eV at a repetition rate of 3 kHz are produced by ionizing neon with waveform-controlled sub-5 fs near-infrared (NIR) laser pulses and spectrally filtering the emerging near-cutoff high-harmonic continuum with a broadband, chirped multilayer molybdenum–silicon (Mo/Si) mirror.
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Schultze et al. (2007) studied this question.
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