The Measurement of the Refractive Index n and k Value of the EUV Resist by EUV Reflectivity Measurement Method

Up to now, we have been researching methods for measuring the simulation parameters of EUV resist. These parameters include the development parameter, the Dill C parameter, the diffusion length of acid generated from PAG, and the deprotection reaction parameter. By using these parameters, we have attempted to simulate EUV resist. As a result, we could investigate the conditions for reducing LER and for enhancing resolution. We hereby report on the methods of calculating the refractive index n and k values of photoresist with EUV light (13.5 nm), which has been difficult to measure until now, and the Dill B parameter, which is an absorption parameter. The three types of photoresists we investigated are the main chain scission type resist, chemically amplified resist, and metal resist.