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A procedure suitable for laboratory practice is described to prepare large-area self-supporting silicon thin crystals with (100), (110) and (111) orientations. Windows up to 2 cm in diameter and 2000 Å in thickness can be produced. Variation in the thickness across the sample can be as low as ±60 Å as measured by 4He+ backscattering spectrometry.
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N.W. Cheung (1980) studied this question.
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