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January 24, 2011Plasma Sources Science and Technology

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

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Authors

JSJulian SchulzeRuhr University BochumESE SchüngelWest Virginia UniversityZDZoltán DonkóHUN-REN Wigner Research Centre for Physics

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Schulze et al. (2011) studied this question.

synapsesocial.com/papers/6a82f929a250d11ff44ccafbhttps://doi.org/10.1088/0963-0252/20/1/015017
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