Investigation of reactive diffusion in the thin-film system CuTi

Investigation of the phase growth kinetics and identification of phases, formed as a result of reactive diffusion in the thin film system of Cu–Ti were carried out by electro-chemical anode dissolution. Two regions were discovered on the curve of the dependence of the thickness of phases on time. The results obtained were discussed from the view of phase formation mechanism and structural changes following the mutual diffusion of metals.