Elastic electron backscattering from surfaces

Elastic electron backscattering from solid surfaces has been studied experimentally and theoretically. It has been shown that the recently published P₁ approximation gives an inadequate description. Much more realistic results are obtained from the Monte Carlo algorithm based on differential cross sections calculated within the partial-wave expansion method. Excellent agreement has been found between the calculated results and the experimental data obtained in the present work or taken from the literature. The present calculations seem to be valid for electron energies exceeding 200 eV and for low- and medium-atomic-number elements. The possibility of measuring the inelastic mean free path of electrons from the elastically backscattered intensity is discussed.