Sinusoidal phase modulating absolute distance measurement interferometer combining frequency-sweeping and multi-wavelength interferometry

A sinusoidal phase modulating absolute distance measurement (ADM) interferometer combining frequency-sweeping interferometry (FSI) and multi-wavelength interferometry (MWI) is proposed in this paper. The swept frequency in FSI and the wavelengths for MWI are calibrated by an optical frequency comb, so the distance measurement can be directly traced back to the SI definition of a meter. With a simple optical structure, an ADM interferometer consisting of a measurement interferometer and a monitor interferometer is constructed without polarization optics. A near-infrared external cavity diode laser (ECDL) calibrated by an optical frequency comb is used as a work source of the measurement interferometer for frequency sweeping and hopping. The monitor interferometer using a He-Ne laser runs parallel to the measurement interferometer to monitor the fluctuation of the measured distance during the measurement. Experiments for absolute distance measurements in a range of 8.25 m were carried out to verify the feasibility of the proposed ADM interferometer. The experimental results show that the maximum measurement error is less than 1 μm compared with an incremental-type laser interferometer.