We demonstrate a1× 256optical phased array based on the tri-layer Si3N4-on-Si platform. By optimizing the thickness and vertical position of the Si3N4overlay, the grating antenna exhibits a ultra-low emission rate of 13.9 dB/cm at 1550 nm and a large bandwidth of 120 nm. Based on the optimized Si3N4assisted grating antenna, the OPA realizes an ultra-sharp beam divergence of0.154∘× 0.0435, a two-dimensional beam steering range of45.6∘× 16.1, and a side lobe suppression ratio better than 10.8 dB.
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Zhang et al. (2022) studied this question.
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