We describe a high-speed digital speckle pattern interferometer incorporating a line-scan camera and a waveguide phase modulator for the measurement of complex deformation (vibration phase and amplitude) at audio acoustic frequencies. Experimental data show continuous phase-stepped recovery of out-of-plane surface deformation in one dimension, obtained at 100 kHz with 2pi/20-rad (0.02-mum) displacement resolution, for surface velocities of 3.2 mm s>(-1) .
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Kilpatrick et al. (2000) studied this question.
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