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July 1, 1975IEEE Transactions on Electron Devices

Considerations on high resolution patterns engraved by ion etching

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MCM. Cantagrel

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M. Cantagrel (1975) studied this question.

synapsesocial.com/papers/6a830d63f2457b8164efe51bhttps://doi.org/10.1109/t-ed.1975.18166
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Also Consider

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  3. 3Manganese sputter-etch masks for integrated optical circuits1974 · 5 citations