The pulsed ion beam of highly energetic argon ions that is generated during the focus phase of the dense-plasma-focus (DPF) device is used to crystallize the as-grown rf-sputtered amorphous thin film of lead zirconate titanate (PZT). Many samples of PZT thin films of different thicknesses are exposed to the DPF device. The 0.9-{μ}m-thick PZT thin film is crystallized to the desired rhombohedral phase. The scanning electron microscopy photograph of this film indicates a reasonably good surface quality.
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Rawat et al. (1993) studied this question.
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