All-optical excitation and detection of microelectrical-mechanical systems

The radiation pressure of a chopped, 3 mW optical beam is used to excite angular motion of a Microelectrical-mechanical-systems’ (MEMS) mirror at its resonant frequencies. The modes are identified with a scanning interferometer, providing an all-optical excitation/detection scheme. The resonant frequencies, mode distributions, spring constants, and coupling between adjacent MEMS devices can, therefore, be studied without the use of electrostatic or other types of actuation. Within the experimental error of ∼30%, the amplitude of angular oscillation is equal to the theoretical value expected for radiation pressure.