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The structure of a vicinal Si(111) stepped surface is analyzed by force microscopy in air to reveal a fine structure in a step bunching area, and a monoatomic step in a terrace region. Step heights of one to three monoatomic layers were also observed on a debunched Si(111) surface. These steps have low crystallographic indices [112̄], [101̄], [01̄1], [213̄], and [ 1̄2̄3]. The force microscope images were in good agreement with scanning electron microscope and reflection electron microscope images observed in ultrahigh vacuum just after sample annealing by resistive heating.
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Suzuki et al. (1991) studied this question.
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