Magnetron Sputtered Fe–C–N, Fe–C, and C–N Based Oxygen Reduction Electrocatalysts

Thin-film libraries of ( , ) have been prepared by combinatorial sputter deposition in a 40/60 process gas. The libraries were subsequently annealed between 800 and to induce structural and compositional changes. These libraries contained/retained more nitrogen than those sputtered in lower partial pressures. Physical and electrochemical properties of these combinatorial libraries were studied using scanning electron microscopy, X-ray photoelectron spectroscopy, and rotating ring-disk electrode cells. Maximum catalytic activity for oxygen reduction reaction in acid was achieved for the libraries annealed at and approaches the best activity of -based electrocatalysts reported in the literature to date.