Effects of Annealing Environment on Interfacial Reactions and Electrical Properties of Ultrathin SrTiO3 on Si, Park, Tae Joo, Kim, Jeong Hwan, Jang, Jae Hyuck, Lee, Joohwi, Lee, Sang Woon, Lee, Sang Young, Jung, Hyung Suk, Hwang, Cheol Seong
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Park et al. (2009) studied this question.