Study of optical transmittance of photocatalytic titanium dioxide films deposited byradiofrequency magnetron sputtering

The optical transmittance of titanium oxide (TiO 2 ) films in the ultraviolet-visible region were studied in this work. Such films have possible application in photocatalysis at room temperature. Among many candidates for photocatalysts, TiO 2 is practically the only material suitable for industrial use at present. This is because TiO 2 has the most efficient photoacatalysis, the highest stability and the lowest cost. Photochemical reactions include the photoinduced redox reactions of adsorbed substances, or the photoinduced hydrophilic conversion of TiO 2 itself. Polyethylene terephthalate (PET) was chosen as the substrate because of its flexibility, high transmission in visible light and low cost. Glass blades were used as substrates for TiO 2 films for analysis by optical transmittance spectroscopy. The experimental results show that the TiO 2 films deposited on glass were associated with the anatase phase with a [0 0 4] preferred orientation. Ultraviolet near infrared spectroscopy revealed the high transmittance of the films in visible light and high absorption in the ultra-violet region under most deposition conditions.