Observation of scattering of particles produced by laser ablation on a substrate by laser induced fluorescence

The scattering of Ba atoms produced from an ArF laser ablated YBa2Cu3O7−δ target on a Si substrate was directly observed by laser induced fluorescence spectroscopy. A gated diode array determined the spatial and the time of flight (TOF) distributions of the scattered Ba atoms on the substrate. It is shown that a sticking coefficient of Ba atoms was less than unity and Ba atoms were scattered roughly isotropically. The velocity of the scattered atoms is estimated from the TOF distribution.