A set of analytic formulas for capacitance of VLSI interconnects of trapezium shape

In VLSI timing analysis, a quick and accurate extraction of interconnect line to line and line to ground capacitance is very important. This paper presents a set of analytic formulas for the capacitance of one, two, and three trapezium interconnect lines over a ground plane which show better than 7% agreement with the capacitance values from the numerical simulation.>