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Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO3) bonded to 1.8 μm of SiO2and an LiNbO3substrate. Measurement results show a Q-factor of 2800 as well as a modulation depth of 18.7 dB.
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Siew et al. (2015) studied this question.
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