Gold-Mask Technique for Fabricating Segmented-Electrode Germanium Detectors

A simple gold-mask technique has been developed for use in the fabrication of germanium nuclear radiation detectors. A layer of gold deposited over the contacts of the detectors acts as masks for chemical etching and surface treatments. It also serves as a reliable, low-resistance electrical connection to the underlying germanium contact. This technique greatly facilitates the fabrication of a wide variety of segmented-electrode planar and coaxial detectors. Examples of these detectors with applications in medical imaging, gamma-ray astronomy and high-energy physics are presented.