Characterization of the Near‐Surface Region of Single‐Crystal Alumina Diffusion Samples Using Rutherford Backscattering and Channeling

Rutherford backscattering was used to characterize the near‐surface region of single‐crystal Al 2 O 3 diffusion samples. Both structural and chemical information was obtained. Results indicate that mechanical polishing produces significant structural damage, but that this damage may be removed through annealing. Glass droplets containing impurities condensed onto the sample surface. The Rutherford backscattering and channeling results indicate that these droplets served as a source for impurities which diffused into the sample during the diffusion anneal.