Cation vacancies on both sublattices (VTi, VSr) have been identified in homoepitaxial pulsed laser deposited SrTiO₃ films using high intensity variable energy positron annihilation lifetime spectroscopy (PALS) measurements. Film nonstoichiometry was varied by varying laser fluence. PALS showed that on increasing the fluence above the Ti/Sr~1 value, the concentration ratio [VSr]/[VTi] systematically increased. Reducing the fluence into the Ti-poor region below resulted in additional vacancy cluster defect formation. Vacancy concentrations greater than ~50 ppm were observed in all films.
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Keeble et al. (2010) studied this question.
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