A rapid thermal annealing (RTA) process for sputter deposited sendust (FeSiAl) films is described and the effects of different annealing conditions on key soft magnetic parameters are discussed. X-ray diffraction is used to understand the microstructure of the RTA sendust films and to establish the presence of the ordered DO/sub 3/ phase. AFM and SEM micrographs are used to describe the morphology of these films. >
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Ullah et al. (1994) studied this question.
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