The effects of heating on both the reflectivity and layered structures of Mo/Si and Mo-silicide/Si (MoSi2/Si and Mo5Si3/Si) multilayers were evaluated. The Cu-Kα x-ray reflectivity and the periodic length of the Mo/Si multilayer markedly decreased after heating at above 300 °C, while those of the Mo-silicide/Si multilayers changed only slightly even after heating up to 600 °C. Transmission electron microscopy observations revealed markedly less thermally induced deterioration in the Mo-silicide/Si multilayers than in the Mo/Si multilayer, indicating that Mo-silicide/Si multilayers have better heat resistance than Mo/Si multilayers.
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Takenaka et al. (1995) studied this question.
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